Bis(Diaryliodonium) Perfluorosulfonimide Zwitterions as Potential Photo Acid Generators
Document Type
Article
Publication Date
4-1-2014
Description
Three examples of bis(diaryliodonium) perfluorosulfonimide (BDI-PFSI) zwitterions have been prepared as a potential new class of ionic photo-acid generators for chemically amplified photoresist formulations.
Citation Information
Mei, Hua; and Desmarteau, Darryl D.. 2014. Bis(Diaryliodonium) Perfluorosulfonimide Zwitterions as Potential Photo Acid Generators. Journal of Fluorine Chemistry. Vol.160 12-15. https://doi.org/10.1016/j.jfluchem.2014.01.004 ISSN: 0022-1139