A Perspective on Ellipsometry
Document Type
Article
Publication Date
1-1-1976
Description
Two distinct and general definitions of ellipsometry and polarimetry are stated ab initio that account for the existing duality in usage of both terms. Ellipsometers and polarimeters are next defined accordingly. The definitions contrast these commonly used similar terms against one another. Viewed within the framework established by these general definitions, optical ellipsometry of interfaces and films (the main topic of this conference) is recognized as a narrow particularization of a broad scheme. Examples of ellipsometry (polarimetry) in different regions of the electromagnetic spectrum provide important perspective on the considerable extent of the field. Another perspective (in a different dimension) is gained when the application of ellipsometry (polarimetry) to different samples is considered. This relates ellipsometry of interfaces and films to polarimetry of bulk anisotropic samples and light scattering by systems of particles. Three individual procedures (namely, polarization measurement, application of electromagnetic theory, and computation) are identified as essential to the complete utilization of ellipsometry (polarimetry).
Citation Information
Azzam, R. M.. 1976. A Perspective on Ellipsometry. Surface Science. Vol.56(C). 6-18. https://doi.org/10.1016/0039-6028(76)90430-1 ISSN: 0039-6028