Aider: Angle-of-Incidence-Derivative Ellipsometry and Reflectometry
Document Type
Article
Publication Date
1-1-1976
Description
A technique is proposed for the direct measurement of the derivatives π{variant}ψ/π{variant}φ{symbol}, π{variant}Δ/π{variant}φ{symbol} and π{variant}R/π{variant}φ{symbol} (or π{variant} In R/π{variant} φ{symbol}) of the ellipsometric (ψ, Δ) and reflectance (R) parameters of an optically isotropic surface with respect to the angle of incidence (φ{symbol}). A sinusoidal rotational oscillation of small amplitude {A figure is presented} is applied to the sample around an axis in its surface perpendicular to the plane of incidence and the resulting ac/dc photoelectric signal-ratio η is measured in an ellipsometer with stationary polarizing and analyzing optics. From three such measurements η1, η2, η3 at three different settings of the ellipsometer optics, the amplitudes of the sinusoidal perturbations {A figure is presented}, {A figure is presented} and {A figure is presented} of the ellipsometric and reflectance parameters, caused by the angle-of-incidence oscillation {A figure is presented}, can be determined. If {A figure is presented}, {A figure is presented} and {A figure is presented} are divided by {A figure is presented}, we get the desired derivatives π{variant}ψ/π{variant}φ{symbol}, π{variant}Δ/π{variant}φ{symbol} and π{variant} In R/π{variant}φ{symbol}. This technique of Angle-of-Incidence-Derivative Ellipsometry and Reflectometry (given the acronym AIDER) promises to open up new possibilities in surface optics particularly for the measurement of the optical properties of film-substrate systems.
Citation Information
Azzam, R. M.. 1976. Aider: Angle-of-Incidence-Derivative Ellipsometry and Reflectometry. Optics Communications. Vol.16(1). 153-156. https://doi.org/10.1016/0030-4018(76)90073-0 ISSN: 0030-4018