Title

Bis(Diaryliodonium) Perfluorosulfonimide Zwitterions as Potential Photo Acid Generators

Document Type

Article

Publication Date

4-1-2014

Description

Three examples of bis(diaryliodonium) perfluorosulfonimide (BDI-PFSI) zwitterions have been prepared as a potential new class of ionic photo-acid generators for chemically amplified photoresist formulations.

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